Invention Grant
- Patent Title: Three-dimensional memory device with backside source contact
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Application No.: US17858695Application Date: 2022-07-06
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Publication No.: US12136618B2Publication Date: 2024-11-05
- Inventor: Kun Zhang , Linchun Wu , Wenxi Zhou , Zhiliang Xia , Zongliang Huo
- Applicant: YANGTZE MEMORY TECHNOLOGIES CO., LTD.
- Applicant Address: CN Wuhan
- Assignee: YANGTZE MEMORY TECHNOLOGIES CO., LTD.
- Current Assignee: YANGTZE MEMORY TECHNOLOGIES CO., LTD.
- Current Assignee Address: CN Wuhan
- Agency: BAYES PLLC
- Main IPC: H01L25/18
- IPC: H01L25/18 ; H01L23/00 ; H01L25/00 ; H01L25/065

Abstract:
Embodiments of 3D memory devices and methods for forming the same are disclosed. In an example, a 3D memory device includes a memory stack comprising interleaved conductive layers and dielectric layers, a plurality of semiconductor layers contacted with each other and located adjacent to the memory stack, a plurality of channel structures each extending vertically through the memory stack and at least one of the semiconductor layers, a source contact in contact with at least one of the semiconductor layers, and a contact pad located on one side of the semiconductor layers that are away from the memory stack.
Public/Granted literature
- US20220336436A1 THREE-DIMENSIONAL MEMORY DEVICE WITH BACKSIDE SOURCE CONTACT Public/Granted day:2022-10-20
Information query
IPC分类: