Invention Grant
- Patent Title: High hole mobility transistor (HHMT) and method of manufacturing the same
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Application No.: US17603297Application Date: 2019-09-30
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Publication No.: US12136669B2Publication Date: 2024-11-05
- Inventor: Zilan Li
- Applicant: GUANGDONG ZHINENG TECHNOLOGIES, CO. LTD.
- Applicant Address: CN Guangdong
- Assignee: GUANGDONG ZHINENG TECHNOLOGIES, CO. LTD.
- Current Assignee: GUANGDONG ZHINENG TECHNOLOGIES, CO. LTD.
- Current Assignee Address: CN Guangdong
- Agency: Seed IP Law Group LLP
- Priority: CN201910291624.6 20190412
- International Application: PCT/CN2019/109382 WO 20190930
- International Announcement: WO2020/206959 WO 20201015
- Main IPC: H01L29/778
- IPC: H01L29/778 ; H01L29/04 ; H01L29/06 ; H01L29/16 ; H01L29/20 ; H01L29/66

Abstract:
The present disclosure relates to a semiconductor device and a method of fabricating the same. The semiconductor device includes: a substrate including a vertical interface; a channel layer disposed outside the vertical interface; and a channel supply layer disposed outside the channel layer; wherein a vertical two-dimensional electron gas 2DEG or two-dimensional hole gas 2DHG is formed in the channel layer adjacent to an interface between the channel layer and the channel supply layer.
Public/Granted literature
- US20220199818A1 HIGH HOLE MOBILITY TRANSISTOR (HHMT) AND METHOD OF MANUFACTURING THE SAME Public/Granted day:2022-06-23
Information query
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