Vibrator element including base part, vibrating arm and weight provided to vibrating arm, vibrator device including vibrator element, and method of manufacturing vibrator element
Abstract:
A vibrator element includes at least one vibrating arm with a weight provided thereto. The weight is provided with at least one processing scar. When an axis which overlaps a center in a width direction of the vibrating arm, and which extends along an extending direction of the vibrating arm is a central axis, and an axis which overlaps a centroid of the vibrating arm, and which extends along the extending direction of the vibrating arm is a centroid axis, the processing scar is formed in at least an area at the centroid axis side with respect to the central axis. S1>S2, where an area of the processing scar located at the centroid axis side with respect to the central axis is S1, and an area of the processing scar located at an opposite side to the centroid axis with respect to the central axis is S2.
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