- Patent Title: Hybrid bonding contact structure of three-dimensional memory device
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Application No.: US18221358Application Date: 2023-07-12
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Publication No.: US12137568B2Publication Date: 2024-11-05
- Inventor: Zhenyu Lu , Simon Shi-Ning Yang , Feng Pan , Steve Weiyi Yang , Jun Chen , Guanping Wu , Wenguang Shi , Weihua Cheng
- Applicant: YANGTZE MEMORY TECHNOLOGIES CO., LTD.
- Applicant Address: CN Wuhan
- Assignee: YANGTZE MEMORY TECHNOLOGIES CO., LTD.
- Current Assignee: YANGTZE MEMORY TECHNOLOGIES CO., LTD.
- Current Assignee Address: CN Wuhan
- Agency: BAYES PLLC
- Priority: CN201710135655.3 20170308
- Main IPC: H10B43/30
- IPC: H10B43/30 ; H01L21/768 ; H01L23/00 ; H01L23/522 ; H01L23/528 ; H01L25/00 ; H01L25/18 ; H10B43/10 ; H10B43/27 ; H10B43/35 ; H10B43/40 ; H10B43/50

Abstract:
A three-dimensional (3D) NAND memory device includes a substrate, a staircase region including a first stack and a second stack, a barrier structure extending vertically through the first stack and laterally separating the first stack from the second stack, and a through array contact extending vertically through the first stack to the substrate. The first stack is disposed on the substrate and includes first and second dielectric layers arranged alternately in a vertical direction. The second stack is disposed on the substrate and includes conductor layers and third dielectric layers arranged alternately in the vertical direction. The barrier structure has an unclosed shape.
Public/Granted literature
- US20230363169A1 HYBRID BONDING CONTACT STRUCTURE OF THREE-DIMENSIONAL MEMORY DEVICE Public/Granted day:2023-11-09
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