Invention Grant
- Patent Title: Memory device and method of forming the same
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Application No.: US18162642Application Date: 2023-01-31
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Publication No.: US12137569B2Publication Date: 2024-11-05
- Inventor: Chao-I Wu , Yu-Ming Lin , Shih-Lien Linus Lu , Sai-Hooi Yeong , Bo-Feng Young
- Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
- Applicant Address: TW Hsinchu
- Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee Address: TW Hsinchu
- Agency: JCIPRNET
- Main IPC: H10B51/20
- IPC: H10B51/20 ; H01L29/24 ; H10B43/20 ; H10B51/10 ; H10B51/30

Abstract:
A memory device includes a multi-layer stack, a plurality of channel layers and a plurality of ferroelectric layers. The multi-layer stack is disposed on a substrate and includes a plurality of gate layers and a plurality of dielectric layers stacked alternately. The plurality of channel layers penetrate through the multi-layer stack and are laterally spaced apart from each other, wherein the plurality of channel layers include a first channel layer and a second channel layer, and a first electron mobility of the first channel layer is different from a second electron mobility of the second channel layer. Each of the plurality of channel layers are spaced apart from the multi-layer stack by one of the plurality of ferroelectric layers, respectively.
Public/Granted literature
- US20230189529A1 MEMORY DEVICE AND METHOD OF FORMING THE SAME Public/Granted day:2023-06-15
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