- Patent Title: Ferroelectric memory device and method of manufacturing the same
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Application No.: US17385576Application Date: 2021-07-26
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Publication No.: US12137572B2Publication Date: 2024-11-05
- Inventor: Yi Yang Wei , Tzu-Yu Lin , Bi-Shen Lee , Hai-Dang Trinh , Hsing-Lien Lin , Hsun-Chung Kuang
- Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: HAYNES AND BOONE, LLP
- Main IPC: H10B53/30
- IPC: H10B53/30 ; H01L49/02

Abstract:
Ferroelectric stacks are disclosed herein that can improve retention performance of ferroelectric memory devices. An exemplary ferroelectric stack has a ferroelectric switching layer (FSL) stack disposed between a first electrode and a second electrode. The ferroelectric stack includes a barrier layer disposed between a first FSL and a second FSL, where a first crystalline condition of the barrier layer is different than a second crystalline condition of the first FSL and/or the second FSL. In some embodiments, the first crystalline condition is an amorphous phase, and the second crystalline condition is an orthorhombic phase. In some embodiments, the first FSL and/or the second FSL include a first metal oxide, and the barrier layer includes a second metal oxide. The ferroelectric stack can be a ferroelectric capacitor, a portion of a transistor, and/or connected to a transistor in a ferroelectric memory device to provide data storage in a non-volatile manner.
Public/Granted literature
- US20220278115A1 Ferroelectric Memory Device and Method of Manufacturing the Same Public/Granted day:2022-09-01
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