Electromechanical transducer with a layer structure
Abstract:
Electromechanical transducer (1, 21, 28) having a layer structure comprising, in this order: a first layer (2) which has, in at least one plane, at least one outwardly insulated, structured, electrically conductive region (3) acting as an electrical shield, a second layer (6) serving as an adhesive layer, which is electrically conductive at least at certain points, a third layer (13, 22) comprising an electromechanical functional element, a fourth layer (15, 23) serving as an adhesive layer, which is electrically conductive at least at certain points, a fifth layer (17, 24), which has, in at least one plane, at least one outwardly insulated structured electrically conductive region (18) acting as an electrical shield. In addition, a method for manufacturing such an electromechanical transducer (1, 21, 28) is described.
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