Invention Grant
- Patent Title: Combiner and distributor for adjusting impedances or power across multiple plasma processing stations
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Application No.: US17590803Application Date: 2022-02-01
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Publication No.: US12143087B2Publication Date: 2024-11-12
- Inventor: Sunil Kapoor , George Thomas , Yaswanth Rangineni , Edward Augustyniak
- Applicant: Lam Research Corporation
- Applicant Address: US CA Fremont
- Assignee: Lam Research Corporation
- Current Assignee: Lam Research Corporation
- Current Assignee Address: US CA Fremont
- Main IPC: H03H7/40
- IPC: H03H7/40 ; C23C16/458 ; C23C16/505 ; C23C16/52

Abstract:
Systems and methods for adjusting impedances or power or a combination thereof across multiple plasma processing stations are described. One of the systems includes a first radio frequency (RF) generator that generates a first RF signal having a first frequency, a second RF generator that generates a second RF signal having a second frequency, and a first matching network coupled to the first RF generator to receive the first RF signal. The first impedance matching network outputs a first modified RF signal upon receiving the first RF signal. The system further includes a second matching network coupled to the second RF generator to receive the second RF signal. The second matching network outputs a second modified RF signal upon receiving the second RF signal. The system further includes a combiner and distributor coupled to an output of the first matching network and an output of the second matching network.
Public/Granted literature
- US20220158604A1 COMBINER AND DISTRIBUTOR FOR ADJUSTING IMPEDANCES OR POWER ACROSS MULTIPLE PLASMA PROCESSING STATIONS Public/Granted day:2022-05-19
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