Invention Grant
- Patent Title: Semiconductor memory device
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Application No.: US18465444Application Date: 2023-09-12
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Publication No.: US12144180B2Publication Date: 2024-11-12
- Inventor: Takeo Mori
- Applicant: Kioxia Corporation
- Applicant Address: JP Tokyo
- Assignee: Kioxia Corporation
- Current Assignee: Kioxia Corporation
- Current Assignee Address: JP Tokyo
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Main IPC: H10B43/30
- IPC: H10B43/30 ; H10B41/27 ; H10B41/30 ; H10B41/35 ; H10B41/41 ; H10B43/10 ; H10B43/27 ; H10B43/35

Abstract:
According to an embodiment, a semiconductor memory device comprises: a stacked body that includes a plurality of control gate electrodes stacked above a substrate; a memory columnar body that extends in a first direction above the substrate and configures a memory string along with the stacked body; and a source contact that extends in the first direction and is electrically connected to one end of the memory string. Moreover, this source contact is adjacent to the stacked body via a spacer insulating layer. Furthermore, a spacer protective layer including a nitride or a metal oxide is provided between these source contact and spacer insulating layer.
Public/Granted literature
- US20230422508A1 SEMICONDUCTOR MEMORY DEVICE AND METHOD OF MANUFACTURING THE SAME Public/Granted day:2023-12-28
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