Invention Grant
- Patent Title: Scanning micro profiler
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Application No.: US17685698Application Date: 2022-03-03
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Publication No.: US12147033B2Publication Date: 2024-11-19
- Inventor: Steven W. Meeks , Hung Phi Nguyen , Alireza Shahdoost Moghaddam
- Applicant: Lumina Instruments Inc.
- Applicant Address: US CA San Jose
- Assignee: Lumina Instruments Inc.
- Current Assignee: Lumina Instruments Inc.
- Current Assignee Address: US CA San Jose
- Agency: Imperium Patent Works LLP
- Agent Mark D. Marrello
- Main IPC: G02B26/12
- IPC: G02B26/12 ; G02B13/00 ; G02B13/22 ; G02B26/10

Abstract:
An optical scanning system includes a radiating source capable of outputting a source light beam, a de-scan lens that is configured to output a de-scanned light beam, the de-scan lens is located approximately one focal length of the de-scan lens from a sample irradiation location, a focusing lens that is configured to output a focused light beam, a first non-polarizing beam splitter configured to be irradiated by at least a portion of the focused light beam, a second non-polarizing beam splitter configured to be irradiated by at least a portion of the focused light beam that is reflected by the first non-polarizing beam splitter, and a detector that is located at approximately one focal length of the focusing lens from the focusing lens, the detector is configured to be irradiated by at least a portion of the focused light beam that is reflected by the second non-polarizing beam splitter.
Public/Granted literature
- US20220269071A1 SCANNING MICRO PROFILER Public/Granted day:2022-08-25
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