Invention Grant
- Patent Title: Plasma processing apparatus
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Application No.: US17666871Application Date: 2022-02-08
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Publication No.: US12148598B2Publication Date: 2024-11-19
- Inventor: Lifu Li , Takaki Kobune
- Applicant: Tokyo Electron Limited
- Applicant Address: JP Tokyo
- Assignee: Tokyo Electron Limited
- Current Assignee: Tokyo Electron Limited
- Current Assignee Address: JP Tokyo
- Agency: Nath, Goldberg & Meyer
- Agent Jerald L. Meyer; Tanya E. Harkins
- Priority: JP2021-020071 20210210
- Main IPC: H01J37/32
- IPC: H01J37/32 ; G05D3/00 ; H05B1/02

Abstract:
A plasma processing apparatus includes: a plasma processing chamber; a first conductive member disposed in the plasma processing chamber and having a first surface; a second conductive member having a second surface facing the first surface of the first conductive member; a third member disposed on at least one selected from the group of the first conductive member and the second conductive member and having a shape that varies according to a temperature change of the third member; and a control mechanism configured to change a temperature of the third member.
Public/Granted literature
- US20220254611A1 PLASMA PROCESSING APPARATUS Public/Granted day:2022-08-11
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