Invention Grant
- Patent Title: Method for manufacturing an electronic device
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Application No.: US18074525Application Date: 2022-12-05
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Publication No.: US12148658B2Publication Date: 2024-11-19
- Inventor: Cheng-Chi Wang , Yeong-E Chen , Cheng-En Cheng
- Applicant: InnoLux Corporation
- Applicant Address: TW Miao-Li County
- Assignee: InnoLux Corporation
- Current Assignee: InnoLux Corporation
- Current Assignee Address: TW Miao-Li County
- Agent Winston Hsu
- Priority: CN202011141658.6 20201022
- Main IPC: H01L21/768
- IPC: H01L21/768 ; H01L21/027 ; H01L21/288 ; H01L21/48 ; H01L21/66 ; H01L21/683

Abstract:
The present disclosure discloses a method for manufacturing an electronic device, including: setting a basic working area; a photoresist coating process; a development process; an etching process; an exposure process; a metal plating process; and a polishing process, wherein the photoresist coating process, the development process, the etching process, the exposure process, the metal plating process and the polishing process respectively have a maximum optimized process area, and a smallest one of the maximum optimized process areas is selected as the basic working area.
Public/Granted literature
- US20230095239A1 METHOD FOR MANUFACTURING AN ELECTRONIC DEVICE Public/Granted day:2023-03-30
Information query
IPC分类: