Invention Grant
- Patent Title: Trench-gate source follower for low-noise scaled pixel
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Application No.: US17489735Application Date: 2021-09-29
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Publication No.: US12148774B2Publication Date: 2024-11-19
- Inventor: Yunfei Gao , Tae Seok Oh , Jinwen Xiao
- Applicant: Shenzhen Goodix Technology Co., Ltd.
- Applicant Address: CN Shenzhen
- Assignee: Shenzhen Goodix Technology Co., Ltd.
- Current Assignee: Shenzhen Goodix Technology Co., Ltd.
- Current Assignee Address: CN Shenzhen
- Agency: Finnegan, Henderson, Farabow, Garrett & Dunner, LLP
- Main IPC: H01L27/146
- IPC: H01L27/146 ; H01L29/423 ; H01L29/66 ; H01L29/78

Abstract:
A trench-gate source-follower (TGSF) transistor is described, such as for integration with image sensor pixels. The TGSF transistor is at least partially built into a trench etched into a substrate. A contiguous doped region is implanted around the inner walls of the trench to form a buried-trench current channel. A trench-gate is formed to have at least a buried portion that fills the volume of the trench. A gate oxide layer can be disposed between the buried portion of the trench-gate and the buried-trench current channel. Drain and source regions are formed on either end of the trench-gate. Activating the trench-gate causes current to flow between the drain and source regions via the buried-trench current channel around the buried portion of the trench-gate. The geometry of the buried-trench current channel can effectively increase the width of the active region of the source-follower transistor without increasing its physical layout width.
Public/Granted literature
- US20230094943A1 TRENCH-GATE SOURCE FOLLOWER FOR LOW-NOISE SCALED PIXEL Public/Granted day:2023-03-30
Information query
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