Invention Grant
- Patent Title: Susceptor for high-temperature use having shaft with low thermal conductivity
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Application No.: US17902420Application Date: 2022-09-02
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Publication No.: US12154799B2Publication Date: 2024-11-26
- Inventor: Jung Chul Jin
- Applicant: MiCo Ceramics Ltd.
- Applicant Address: KR Gyeonggi-do
- Assignee: MiCo Ceramics Ltd.
- Current Assignee: MiCo Ceramics Ltd.
- Current Assignee Address: KR Gyeonggi-do
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: KR10-2021-0124972 20210917
- Main IPC: H01L21/67
- IPC: H01L21/67 ; H01L21/687 ; H05B3/14

Abstract:
Disclosed is a susceptor for high-temperature use having a shaft with low thermal conductivity, wherein in a susceptor including a plate for wafer mounting and a shaft coupled to the plate, the plate and the shaft each include a sintered body having 90 wt % or more of an AlN phase, the sintered body of the plate is a magnesium-containing AlN sintered body having a volume resistance of 5*108 Ω·cm or more at 650° C., and the sintered body of the shaft is an AlN sintered body having a room-temperature thermal conductivity of 100 W/mK or less.
Public/Granted literature
- US20230088822A1 SUSCEPTOR FOR HIGH-TEMPERATURE USE HAVING SHAFT WITH LOW THERMAL CONDUCTIVITY Public/Granted day:2023-03-23
Information query
IPC分类: