Invention Grant
- Patent Title: Self-aligned patterning with colored blocking and structures resulting therefrom
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Application No.: US16579088Application Date: 2019-09-23
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Publication No.: US12154855B2Publication Date: 2024-11-26
- Inventor: Mohit K. Haran , Reken Patel , Richard E. Schenker , Charles H. Wallace
- Applicant: Intel Corporation
- Applicant Address: US CA Santa Clara
- Assignee: Intel Corporation
- Current Assignee: Intel Corporation
- Current Assignee Address: US CA Santa Clara
- Agency: Schwabe, Williamson & Wyatt, P.C.
- Main IPC: H01L23/528
- IPC: H01L23/528 ; H01L21/027 ; H01L21/311 ; H01L21/768 ; H01L23/522 ; H01L23/532 ; H01L21/02

Abstract:
Self-aligned patterning with colored blocking and resulting structures are described. In an example, an integrated circuit structure includes an inter-layer dielectric (ILD) layer above a substrate, and a hardmask layer on the ILD layer. A plurality of conductive interconnect lines is in and spaced apart by the ILD layer and the hardmask layer. The plurality of conductive interconnect lines includes a first interconnect line having a first width. A second interconnect line is immediately adjacent the first interconnect line by a first distance, the second interconnect line having the first width. A third interconnect line is immediately adjacent the second interconnect line by the first distance, the third interconnect line having the first width. A fourth interconnect line is immediately adjacent the third interconnect line by a second distance greater than the first distance, the fourth interconnect line having a second width greater than the first width.
Public/Granted literature
- US20210090997A1 SELF-ALIGNED PATTERNING WITH COLORED BLOCKING AND STRUCTURES RESULTING THEREFROM Public/Granted day:2021-03-25
Information query
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