- Patent Title: Inductively coupled plasma light source with switched power supply
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Application No.: US18077443Application Date: 2022-12-08
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Publication No.: US12156322B2Publication Date: 2024-11-26
- Inventor: Frederick Marvin Niell, III , Donald K. Smith , Matthew M. Besen , Stephen F. Horne , David B. Reisman , Daniel J. Arcaro , Michael J. Roderick
- Applicant: Hamamatsu Photonics K.K. , Energetiq Technology, Inc.
- Applicant Address: JP Shizuoka; US MA Wilmington
- Assignee: Hamamatsu Photonics K.K.,Energetiq Technology, Inc.
- Current Assignee: Hamamatsu Photonics K.K.,Energetiq Technology, Inc.
- Current Assignee Address: JP Shizuoka; US MA Wilmington
- Agency: Rauschenbach Patent Law Group, PLLC
- Agent Kurt Rauschenbach
- Main IPC: H05H1/00
- IPC: H05H1/00 ; H01J37/32 ; H05H1/10

Abstract:
A method and apparatus for generating light includes a chamber having a high voltage region, a low voltage region, and a plasma generation region that defines a plasma confinement region. A magnetic core is positioned around the chamber and is configured to generate a plasma in the plasma confinement region. A switched power supply includes a DC power supply and a switched resonant charging circuit that together generate a plurality of voltage pulses at the output causing a plurality of current pulses to be applied to the power delivery section around the magnetic core so that at least one plasma loop is established around the magnetic core that confines plasma in the plasma confinement region, thereby forming a magnetically confined Z-pinch plasma. Light generated by the Z-pinch plasma propagates out of a port in the light source.
Public/Granted literature
- US20240196506A1 Inductively Coupled Plasma Light Source with Switched Power Supply Public/Granted day:2024-06-13
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