Invention Grant
- Patent Title: 3D and flash memory device and method of fabricating the same
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Application No.: US17721222Application Date: 2022-04-14
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Publication No.: US12156402B2Publication Date: 2024-11-26
- Inventor: Chih-Wei Hu , Teng Hao Yeh
- Applicant: MACRONIX International Co., Ltd.
- Applicant Address: TW Hsinchu
- Assignee: MACRONIX International Co., Ltd.
- Current Assignee: MACRONIX International Co., Ltd.
- Current Assignee Address: TW Hsinchu
- Agency: J.C. PATENTS
- Main IPC: H10B41/27
- IPC: H10B41/27 ; G11C16/04 ; H10B41/10 ; H10B43/10 ; H10B43/27

Abstract:
A 3D AND flash memory device includes a gate stack structure, a channel pillar, a source pillar, a charge storage structure, a first transistor and a second transistor. The gate stack structure is located on a dielectric substrate, wherein the gate stack structure includes a plurality of gate layers and a plurality of insulating layers alternately stacked. The channel pillar extends through the gate stack structure. The source pillar and the drain pillar are disposed in the channel pillar and electrically connected to the channel pillar. The charge storage structure is located between the plurality of gate layers and the channel pillar. The first transistor is located above the gate stack structure and electrically connected to the drain pillar. The second transistor is located above the gate stack structure and electrically connected to the source pillar.
Public/Granted literature
- US20230337422A1 3D AND FLASH MEMORY DEVICE AND METHOD OF FABRICATING THE SAME Public/Granted day:2023-10-19
Information query