Invention Grant
- Patent Title: Piezoelectric device having plurality of vibrating regions and electronic apparatus
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Application No.: US16690553Application Date: 2019-11-21
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Publication No.: US12156475B2Publication Date: 2024-11-26
- Inventor: Chikara Kojima , Koji Ohashi , Hironori Suzuki , Kanechika Kiyose , Katsuhiro Imai , Yasuyuki Matsumoto , Takahiro Kamijo
- Applicant: SEIKO EPSON CORPORATION
- Applicant Address: JP Tokyo
- Assignee: SEIKO EPSON CORPORATION
- Current Assignee: SEIKO EPSON CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Oliff PLC
- Priority: JP2018-219037 20181122
- Main IPC: H01L41/047
- IPC: H01L41/047 ; B06B1/02 ; B06B1/06 ; H01L41/04 ; H01L41/08 ; H10N30/00 ; H10N30/80 ; H10N30/87 ; G01S15/08

Abstract:
A piezoelectric device includes a substrate having opening portions, a vibrating plate provided to overlap with the substrate and having a plurality of vibrating regions overlapping with the opening portions in a plan view as seen from a thickness direction of the substrate, piezoelectric elements provided in the vibrating regions, and bypass wires provided outside of the vibrating regions of the vibrating plate and electrically coupled to the plurality of piezoelectric elements, wherein slits penetrating the bypass wires in the thickness direction are provided in the bypass wires.
Public/Granted literature
- US20200168784A1 PIEZOELECTRIC DEVICE AND ELECTRONIC APPARATUS Public/Granted day:2020-05-28
Information query
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