Invention Grant
- Patent Title: Device and method for measuring laser displacement
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Application No.: US17973391Application Date: 2022-10-25
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Publication No.: US12158340B2Publication Date: 2024-12-03
- Inventor: Jianjun Cui , Peng Zhang , Kai Chen
- Applicant: National Institute of Metrology
- Applicant Address: CN Beijing
- Assignee: National Institute of Metrology
- Current Assignee: National Institute of Metrology
- Current Assignee Address: CN Beijing
- Agency: Westbridge IP LLC
- Priority: CN202110910775.2 20210810
- Main IPC: G01B9/02001
- IPC: G01B9/02001

Abstract:
Disclosed are a device and a method for measuring laser displacement. The device comprises an interferometric measurement module, a laser light source module, a signal modulation module, a control processing module and an optical vernier demodulation module. The control processing module controls the signal modulation module to apply a light source modulation signal to the laser light source module, so that the laser light source module provides two laser beams with fixed frequency difference to the interferometric measurement module. The control processing module controls the interferometric measurement module to perform interferometric measurement. During measurement, lasers respectively interfere in two Fabry-Perot cavities in the interferometric measurement module, and are detected by two photodetectors to form main and secondary measurement interference signals. The optical vernier demodulation module demodulates the main and secondary measurement interference signals obtained by the interferometric measurement module.
Public/Granted literature
- US20230047877A1 DEVICE AND METHOD FOR MEASURING LASER DISPLACEMENT Public/Granted day:2023-02-16
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