Invention Grant
- Patent Title: Plasma processing apparatus
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Application No.: US17835251Application Date: 2022-06-08
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Publication No.: US12159771B2Publication Date: 2024-12-03
- Inventor: Yuki Kawada , Naoto Hayasaka
- Applicant: Tokyo Electron Limited
- Applicant Address: JP Tokyo
- Assignee: Tokyo Electron Limited
- Current Assignee: Tokyo Electron Limited
- Current Assignee Address: JP Tokyo
- Agency: XSENSUS LLP
- Priority: JP2021-095895 20210608
- Main IPC: H01J37/32
- IPC: H01J37/32

Abstract:
There is provided a plasma processing apparatus comprising: a plasma processing chamber having an upper wall, a sidewall, and a lower wall and having therein a plasma processing space; and a magnetic shield disposed around an outer side of the sidewall and having an opening at an upper side thereof. On the assumption that an angle between a line that passes through a midpoint of an inner surface of the upper wall on the plasma processing space side and connects end points of the opening and the inner surface is θ[°] and a product μi×t of an initial relative permeability μi of a magnetic material forming the magnetic shield and a thickness t[m] of the magnetic shield is Pmc[m], the angle θ[°] satisfies a condition θ>764×Pmc−2+179×Pmc−1+21.3.
Public/Granted literature
- US20220399191A1 PLASMA PROCESSING APPARATUS Public/Granted day:2022-12-15
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