- Patent Title: Pyrometry error detection sensor for RTP temperature control system
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Application No.: US17403693Application Date: 2021-08-16
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Publication No.: US12159797B2Publication Date: 2024-12-03
- Inventor: Wolfgang Aderhold , Samuel Howells , Amritha Rammohan , Huy Q. Nguyen
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Schwabe, Williamson & Wyatt, P.C.
- Main IPC: H01L21/67
- IPC: H01L21/67 ; G01J5/00 ; G01J5/0806 ; G01J5/0818 ; G01J5/80

Abstract:
Embodiments disclosed herein include a method for determining a temperature error of a pyrometer. In an embodiment, the method comprises measuring a first signal with a first sensor of the pyrometer and measuring a second signal with a second sensor of the pyrometer. In an embodiment, the method further comprises determining a reflectivity of a reflector plate from the first signal and the second signal, and determining the temperature error using the reflectivity.
Public/Granted literature
- US20230051521A1 PYROMETRY ERROR DETECTION SENSOR FOR RTP TEMPERATURE CONTROL SYSTEM Public/Granted day:2023-02-16
Information query
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