Invention Grant
- Patent Title: Power transistor cell and power transistor having field shielding contacting areas connecting field shielding areas to metal areas
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Application No.: US17595798Application Date: 2020-05-18
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Publication No.: US12159900B2Publication Date: 2024-12-03
- Inventor: Alberto Martinez-Limia , Jan-Hendrik Alsmeier , Klaus Heyers , Stephan Schwaiger , Wolfgang Feiler
- Applicant: Robert Bosch GmbH
- Applicant Address: DE Stuttgart
- Assignee: Robert Bosch GmbH
- Current Assignee: Robert Bosch GmbH
- Current Assignee Address: DE Stuttgart
- Agency: NORTON ROSE FULBRIGHT US LLP
- Agent Gerard A. Messina
- Priority: DE102019208010.3 20190531,DE102019210681.1 20190719
- International Application: PCT/EP2020/063821 WO 20200518
- International Announcement: WO2020/239501 WO 20201203
- Main IPC: H01L29/06
- IPC: H01L29/06 ; H01L29/10 ; H01L29/16 ; H01L29/423 ; H01L29/78

Abstract:
A power transistor cell including a layer arrangement, which includes a front side and a rear side, the front side being situated opposite the rear side. A trench extends starting from, and perpendicular to, the front side along a first direction into the layer arrangement. The trench extends at least into a current-spreading layer, and expands along a second direction, which is situated perpendicularly to the first direction. Field shielding areas are situated at least partially in the current-spreading layer, wherein source areas and field shielding contacting areas are situated alternatingly along the second direction. One portion each of the body areas is situated between each source area and each field shielding contacting area. The field shielding contacting areas connect the field shielding areas to first metal areas on the front side. The field shielding contacting areas make contact at least partially with side faces of the trench.
Public/Granted literature
- US20220320286A1 POWER TRANSISTOR CELL AND POWER TRANSISTOR Public/Granted day:2022-10-06
Information query
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