Invention Grant
- Patent Title: Group III nitride-based transistor device
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Application No.: US17743720Application Date: 2022-05-13
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Publication No.: US12159918B2Publication Date: 2024-12-03
- Inventor: Clemens Ostermaier , Oliver Haeberlen , Gerhard Prechtl , Manuel Stabentheiner
- Applicant: Infineon Technologies Austria AG
- Applicant Address: AT Villach
- Assignee: Infineon Technologies Austria AG
- Current Assignee: Infineon Technologies Austria AG
- Current Assignee Address: AT Villach
- Agency: Murphy, Bilak & Homiller, PLLC
- Priority: EP19167106 20190403
- Main IPC: H01L29/778
- IPC: H01L29/778 ; H01L29/20 ; H01L29/423 ; H01L29/66

Abstract:
In an embodiment, a Group III nitride-based transistor device, includes a first Group III nitride barrier layer arranged on a Group III nitride channel layer, the first Group III nitride barrier layer and the Group III nitride channel layer having differing bandgaps and forming a heterojunction capable of supporting a two-dimensional charge gas. A source, a gate and a drain are on an upper surface of the first Group III nitride barrier layer. A gate recess extends from the upper surface of the first Group III nitride barrier layer into the first Group III nitride barrier layer. A p-doped Group III nitride material arranged in the gate recess has a first extension extending on the upper surface of the first Group III nitride barrier layer towards the drain. The first extension has a length ld, and 0 nm≤ld≤200 nm.
Public/Granted literature
- US20220271147A1 Group III Nitride-Based Transistor Device Public/Granted day:2022-08-25
Information query
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