Invention Grant
- Patent Title: Photoelectric conversion apparatus including metal film containing hydrogen and carbon
-
Application No.: US17575504Application Date: 2022-01-13
-
Publication No.: US12159946B2Publication Date: 2024-12-03
- Inventor: Yoshiei Tanaka , Takumi Ogino , Tsutomu Tange
- Applicant: CANON KABUSHIKI KAISHA
- Applicant Address: JP Tokyo
- Assignee: CANON KABUSHIKI KAISHA
- Current Assignee: CANON KABUSHIKI KAISHA
- Current Assignee Address: JP Tokyo
- Agency: Canon U.S.A., Inc. I.P. Division
- Priority: JP2021-007474 20210120
- Main IPC: H01L31/02
- IPC: H01L31/02 ; H01L27/146

Abstract:
A photoelectric conversion apparatus comprises a semiconductor layer including a plurality of photoelectric conversion portions and having a first surface and a second surface that is the surface opposite to the first surface, a wiring structure disposed on the second surface side of the semiconductor layer, and a metal compound film disposed on the first surface side of the semiconductor layer. The metal compound film contains hydrogen and carbon. The concentration of the hydrogen in the interface on the semiconductor layer side of the metal compound film is 1×1021 atoms/cm3 or more and 1×1022 atoms/cm3 or less. The concentration of the carbon in the interface on the semiconductor layer side of the metal compound film is 5×1020 atoms/cm3 or more and 1×1022 atoms/cm3 or less.
Public/Granted literature
- US20220231175A1 PHOTOELECTRIC CONVERSION APPARATUS AND EQUIPMENT Public/Granted day:2022-07-21
Information query
IPC分类: