Invention Grant
- Patent Title: MEMS-based phase spatial light modulating architecture
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Application No.: US16653026Application Date: 2019-10-15
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Publication No.: US12160084B2Publication Date: 2024-12-03
- Inventor: James Norman Hall , Terry Alan Bartlett , William Craig McDonald
- Applicant: Texas Instruments Incorporated
- Applicant Address: US TX Dallas
- Assignee: Texas Instruments Incorporated
- Current Assignee: Texas Instruments Incorporated
- Current Assignee Address: US TX Dallas
- Agent Michelle F. Murray; Frank D. Cimino
- Main IPC: H01S5/00
- IPC: H01S5/00 ; G02B5/08 ; G03B21/00 ; H01S5/062

Abstract:
Described examples include apparatus having a driving electrode on a substrate. The apparatus has a platform suspended above the driving electrode and conductively coupled to a platform electrode, where the platform is configured to move in a direction perpendicular to a surface of the substrate in response to a voltage difference applied between the driving electrode and the platform electrode. The apparatus also has a mirror post on the platform. The apparatus has a mirror coupled to the platform by the mirror post, where the mirror is rectangular.
Public/Granted literature
- US20210111537A1 MEMS-BASED PHASE SPATIAL LIGHT MODULATING ARCHITECTURE Public/Granted day:2021-04-15
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