MEMS-based phase spatial light modulating architecture
Abstract:
Described examples include apparatus having a driving electrode on a substrate. The apparatus has a platform suspended above the driving electrode and conductively coupled to a platform electrode, where the platform is configured to move in a direction perpendicular to a surface of the substrate in response to a voltage difference applied between the driving electrode and the platform electrode. The apparatus also has a mirror post on the platform. The apparatus has a mirror coupled to the platform by the mirror post, where the mirror is rectangular.
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