Invention Grant
- Patent Title: Reflective compact lens for magneto-optic Kerr effect metrology system
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Application No.: US17505591Application Date: 2021-10-19
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Publication No.: US12164093B2Publication Date: 2024-12-10
- Inventor: Alex Zheng , Jun Wang , David Y. Wang , Chunxia Li , Changfei Yan , Rui Ni , Lansheng Dong , Yang Zhou , Hai-Yang You , Haijing Peng , Walter H. Johnson , Shankar Krishnan , Jianou Shi
- Applicant: KLA CORPORATION
- Applicant Address: US CA Milpitas
- Assignee: KLA CORPORATION
- Current Assignee: KLA CORPORATION
- Current Assignee Address: US CA Milpitas
- Agency: Hodgson Russ LLP
- Main IPC: G02B17/06
- IPC: G02B17/06 ; G02B5/10
Abstract:
A Cassegrain or quasi-Cassegrain structure objective lens is used in a polar MOKE metrology system. The quasi-Cassegrain reflective objective lens includes a primary concave mirror and a secondary mirror. The primary concave mirror has a wider diameter than the secondary mirror and defines an aperture through which the laser beam is configured to be transmitted toward the secondary mirror. The secondary mirror can be convex, concave, or have a flat surface.
Public/Granted literature
- US20220137380A1 REFLECTIVE COMPACT LENS FOR MAGNETO-OPTIC KERR EFFECT METROLOGY SYSTEM Public/Granted day:2022-05-05
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