Packaging substrate and semiconductor apparatus comprising same
Abstract:
A semiconductor apparatus includes a semiconductor element unit comprising one or more semiconductor elements, a packaging substrate, and a motherboard. The packaging substrate, connected to the semiconductor elements, includes a core layer and an upper layer disposed on the core layer. The core layer includes a glass substrate, a core via, and a core distribution layer. The glass substrate having a first surface and a second surface facing each other. A part of the core distribution layer connects electrically conductive layers of the first surface and an electrically conductive layer of the second surface through the core via penetrating through the glass substrate. A thickness of a thinner one among electrically conductive layers of the core distribution layer is the same as or greater than a width of a thinner one among the electrically conductive layers of the upper layer.
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