Invention Grant
- Patent Title: Semiconductor device
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Application No.: US17433458Application Date: 2020-02-19
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Publication No.: US12166134B2Publication Date: 2024-12-10
- Inventor: Shunpei Yamazaki , Toshimitsu Obonai , Junichi Koezuka , Kenichi Okazaki
- Applicant: SEMICONDUCTOR ENERGY LABORATORY CO., LTD.
- Applicant Address: JP Atsugi
- Assignee: SEMICONDUCTOR ENERGY LABORATORY CO., LTD.
- Current Assignee: SEMICONDUCTOR ENERGY LABORATORY CO., LTD.
- Current Assignee Address: JP Atsugi
- Agency: NIXON PEABODY LLP
- Agent Jeffrey L. Costellia
- Priority: JP2019-037916 20190301,JP2019-081285 20190422
- International Application: PCT/IB2020/051350 WO 20200219
- International Announcement: WO2020/178654 WO 20200910
- Main IPC: H01L29/786
- IPC: H01L29/786 ; H01L27/12 ; H01L29/04 ; H01L29/24 ; H01L29/49 ; G02F1/1368 ; H10K59/121

Abstract:
A semiconductor device with favorable electrical characteristics is provided. A semiconductor device with high reliability is provided. A semiconductor device with stable electrical characteristics is provided. The semiconductor device includes a semiconductor layer, a first insulating layer, a second insulating layer, and a conductive layer. The semiconductor layer, the second insulating layer, and the conductive layer are stacked in this order over the first insulating layer. The semiconductor layer contains indium and oxygen and has a composition falling within a range obtained by connecting first coordinates (1:0:0), second coordinates (2:1:0), third coordinates (14:7:1), fourth coordinates (7:2:2), fifth coordinates (14:4:21), sixth coordinates (2:0:3), and the first coordinates in this order with a straight line in a ternary diagram showing atomic ratios of indium to an element M and zinc. In addition, the element M is one or more of gallium, aluminum, yttrium, and tin.
Public/Granted literature
- US20220149201A1 SEMICONDUCTOR DEVICE Public/Granted day:2022-05-12
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