Invention Grant
- Patent Title: Transport system, processing system, and article manufacturing method
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Application No.: US17566276Application Date: 2021-12-30
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Publication No.: US12166435B2Publication Date: 2024-12-10
- Inventor: Nobuaki Fujii , Takeshi Yamamoto
- Applicant: CANON KABUSHIKI KAISHA
- Applicant Address: JP Tokyo
- Assignee: CANON KABUSHIKI KAISHA
- Current Assignee: CANON KABUSHIKI KAISHA
- Current Assignee Address: JP Tokyo
- Agency: Canon U.S.A., Inc. IP Division
- Priority: JP2021-003049 20210112,JP2021-190122 20211124
- Main IPC: H02N15/00
- IPC: H02N15/00 ; H01F7/20

Abstract:
A transport system includes a mover, a stator, and a control unit. The mover moves in a first direction. The stator includes a plurality of coils arranged in the first direction and applies force to transport the mover in the first direction while using the plurality of coils, to which current is applied, to levitate the mover in a second direction intersecting the first direction. The control unit controls the current applied to the plurality of coils to control operation of the mover. The control unit controls the current applied to the plurality of coils using machine difference information of the mover to control an attitude of the mover while the mover is being levitated.
Public/Granted literature
- US20220224255A1 TRANSPORT SYSTEM, PROCESSING SYSTEM, AND ARTICLE MANUFACTURING METHOD Public/Granted day:2022-07-14
Information query
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