Transport system, processing system, and article manufacturing method
Abstract:
A transport system includes a mover, a stator, and a control unit. The mover moves in a first direction. The stator includes a plurality of coils arranged in the first direction and applies force to transport the mover in the first direction while using the plurality of coils, to which current is applied, to levitate the mover in a second direction intersecting the first direction. The control unit controls the current applied to the plurality of coils to control operation of the mover. The control unit controls the current applied to the plurality of coils using machine difference information of the mover to control an attitude of the mover while the mover is being levitated.
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