Invention Grant
- Patent Title: Piezo-actuated MEMS resonator with reduced nonlinear tcf
-
Application No.: US18402488Application Date: 2024-01-02
-
Publication No.: US12166464B2Publication Date: 2024-12-10
- Inventor: Joseph C. Doll , Paul M. Hagelin , Ginel C. Hill , Nicholas Miller , Charles I. Grosjean
- Applicant: SiTime Coporation
- Applicant Address: US CA Santa Clara
- Assignee: SiTime Coporation
- Current Assignee: SiTime Coporation
- Current Assignee Address: US CA Santa Clara
- Main IPC: H03H9/02
- IPC: H03H9/02 ; H03H9/24 ; H10N30/04 ; H10N30/06 ; H10N30/074 ; H10N30/87 ; H03H3/02 ; H03H9/15
Abstract:
A microelectromechanical system (MEMS) resonator includes a degenerately-doped single-crystal silicon layer and a piezoelectric material layer disposed on the degenerately-doped single-crystal silicon layer. An electrically-conductive material layer is disposed on the piezoelectric material layer opposite the degenerately-doped single-crystal silicon layer, and patterned to form first and second electrodes.
Public/Granted literature
- US20240223151A1 Piezo-actuated MEMS Resonator Public/Granted day:2024-07-04
Information query
