Invention Grant
- Patent Title: Operating method of electronic device for semiconductor memory manufacture
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Application No.: US17510652Application Date: 2021-10-26
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Publication No.: US12169678B2Publication Date: 2024-12-17
- Inventor: Useong Kim , Bayram Yenikaya , Mindy Lee , Xin Zhou , Hee-Jun Lee , Woo-Yong Cho
- Applicant: Samsung Electronics Co., Ltd.
- Applicant Address: KR Suwon-si
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Suwon-si
- Agency: Muir Patent Law, PLLC
- Main IPC: G06F30/398
- IPC: G06F30/398 ; G06V10/44 ; G06V10/88

Abstract:
Disclosed is an operating method of an electronic device for manufacture of a semiconductor device. The operating method includes receiving a layout image of the semiconductor device, generating an intermediate image by generating assist features based on main features of the layout image, evaluating a process result by performing simulation based on the intermediate image, and correcting the intermediate image by correcting shapes of the main features and/or the assist features of the intermediate image based on the process result.
Public/Granted literature
- US20230125680A1 OPERATING METHOD OF ELECTRONIC DEVICE FOR SEMICONDUCTOR MEMORY MANUFACTURE Public/Granted day:2023-04-27
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