Invention Grant
- Patent Title: Stacked semiconductor devices and methods of forming same
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Application No.: US18447460Application Date: 2023-08-10
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Publication No.: US12170207B2Publication Date: 2024-12-17
- Inventor: Hsien-Wei Chen , Der-Chyang Yeh , Li-Hsien Huang
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Applicant Address: TW Hsinchu
- Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee Address: TW Hsinchu
- Agency: Slater Matsil, LLP
- Main IPC: H01L21/56
- IPC: H01L21/56 ; H01L23/00 ; H01L23/31 ; H01L25/065 ; H01L25/10

Abstract:
Stacked semiconductor devices and methods of forming the same are provided. Contact pads are formed on a die. A passivation layer is blanket deposited over the contact pads. The passivation layer is subsequently patterned to form first openings, the first openings exposing the contact pads. A buffer layer is blanket deposited over the passivation layer and the contact pads. The buffer layer is subsequently patterned to form second openings, the second opening exposing a first set of the contact pads. First conductive pillars are formed in the second openings. Conductive lines are formed over the buffer layer simultaneously with the first conductive pillars, ends of the conductive lines terminating with the first conductive pillars. An external connector structure is formed over the first conductive pillars and the conductive lines, the first conductive pillars electrically coupling the contact pads to the external connector structure.
Public/Granted literature
- US20230386864A1 STACKED SEMICONDUCTOR DEVICES AND METHODS OF FORMING SAME Public/Granted day:2023-11-30
Information query
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