Invention Grant
- Patent Title: Daisy-chain seal ring structure
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Application No.: US18335413Application Date: 2023-06-15
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Publication No.: US12170234B2Publication Date: 2024-12-17
- Inventor: Chun-Liang Lu , Chun-Wei Chia , Chun-Hao Chou , Kuo-Cheng Lee
- Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
- Applicant Address: TW Hsinchu
- Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee Address: TW Hsinchu
- Agency: Harrity & Harrity, LLP
- Main IPC: H01L23/58
- IPC: H01L23/58 ; H01L21/66 ; H01L23/00 ; H01L29/10

Abstract:
A semiconductor device includes a first wafer and a second wafer. The semiconductor device includes a seal ring structure comprising a first metal structure in a body of the first wafer, a second metal structure in the body of the first wafer, a third metal structure in a body of the second wafer, and a metal bonding structure including a first set of metal elements coupling the first metal structure and the third metal structure through an interface between the first wafer and the second wafer, and a second set of metal elements coupling the second metal structure and the third metal structure through the interface between the first wafer and the second wafer.
Public/Granted literature
- US20230326815A1 DAISY-CHAIN SEAL RING STRUCTURE Public/Granted day:2023-10-12
Information query
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