Invention Grant
- Patent Title: EUV light source with a beam positioning device
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Application No.: US18644458Application Date: 2024-04-24
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Publication No.: US12171054B2Publication Date: 2024-12-17
- Inventor: Martin Lambert , Boris Regaard , Tolga Ergin , Oliver Schlosser
- Applicant: TRUMPF Lasersystems for Semiconductor Manufacturing GmbH
- Applicant Address: DE Ditzingen
- Assignee: TRUMPF Lasersystems for Semiconductor Manufacturing GmbH
- Current Assignee: TRUMPF Lasersystems for Semiconductor Manufacturing GmbH
- Current Assignee Address: DE Ditzingen
- Agency: LEYDIG, VOIT & MAYER, LTD.
- Main IPC: H05G2/00
- IPC: H05G2/00 ; G03F7/00

Abstract:
An extreme ultraviolet (EUV) light source includes a providing device for providing a target material, a pulsed laser source for emitting a pulsed laser beam, and a beam guidance device for supplying the pulsed laser beam from the pulsed laser source into a radiation generation chamber and for focused irradiation of the target material with the pulsed laser beam. The target material is configured to emit EUV radiation on account of the irradiation. The beam guidance device includes a beam positioning device comprising four mirrors as two mirror pairs for positioning the pulsed laser beam. Each of the four mirrors is rotatable about exactly one axis of rotation. The axes of rotation of the two mirrors of a first mirror pair are aligned along a first spatial direction. The axes of rotation of the two mirrors of a second mirror pair are aligned along a second spatial direction.
Public/Granted literature
- US20240357726A1 EUV LIGHT SOURCE WITH A BEAM POSITIONING DEVICE Public/Granted day:2024-10-24
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