Invention Grant
- Patent Title: Three-dimensional memory device with improved charge lateral migration and method for forming the same
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Application No.: US17488879Application Date: 2021-09-29
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Publication No.: US12171098B2Publication Date: 2024-12-17
- Inventor: Xiaoxin Liu , Lei Xue , Zhiliang Xia
- Applicant: YANGTZE MEMORY TECHNOLOGIES CO., LTD.
- Applicant Address: CN Wuhan
- Assignee: YANGTZE MEMORY TECHNOLOGIES CO., LTD.
- Current Assignee: YANGTZE MEMORY TECHNOLOGIES CO., LTD.
- Current Assignee Address: CN Wuhan
- Agency: BAYES PLLC
- Priority: CN202011120882.7 20201019,CN202110628570.5 20210607
- Main IPC: H10B43/27
- IPC: H10B43/27 ; H01L21/28 ; H01L29/423

Abstract:
A three-dimensional (3D) memory device includes a stack structure and a channel structure. The stack structure includes interleaved conductive layers and dielectric layers. The channel structure extends through the stack structure along a first direction. The channel structure includes a semiconductor channel, and a memory film over the semiconductor channel. The memory film includes a tunneling layer over the semiconductor channel, a storage layer over the tunneling layer, and a blocking layer over the storage layer. The blocking layer and the storage layer are separated by the dielectric layers into a plurality of sections.
Public/Granted literature
- US20220123016A1 THREE-DIMENSIONAL MEMORY DEVICE AND METHOD FOR FORMING THE SAME Public/Granted day:2022-04-21
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