Three-dimensional memory device with improved charge lateral migration and method for forming the same
Abstract:
A three-dimensional (3D) memory device includes a stack structure and a channel structure. The stack structure includes interleaved conductive layers and dielectric layers. The channel structure extends through the stack structure along a first direction. The channel structure includes a semiconductor channel, and a memory film over the semiconductor channel. The memory film includes a tunneling layer over the semiconductor channel, a storage layer over the tunneling layer, and a blocking layer over the storage layer. The blocking layer and the storage layer are separated by the dielectric layers into a plurality of sections.
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