Invention Grant
- Patent Title: Memory arrays comprising strings of memory cells and methods used in forming a memory array comprising strings of memory cells
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Application No.: US17583651Application Date: 2022-01-25
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Publication No.: US12176035B2Publication Date: 2024-12-24
- Inventor: Alyssa N. Scarbrough , John D. Hopkins
- Applicant: Micron Technology, Inc.
- Applicant Address: US ID Boise
- Assignee: Micron Technology, Inc.
- Current Assignee: Micron Technology, Inc.
- Current Assignee Address: US ID Boise
- Agency: Wells St. John P.S.
- Main IPC: H01L29/76
- IPC: H01L29/76 ; G11C16/04 ; H01L23/522 ; H01L23/528 ; H10B41/10 ; H10B41/27 ; H10B43/10 ; H10B43/27

Abstract:
A memory array comprising strings of memory cells comprises laterally-spaced memory blocks individually comprising a vertical stack comprising alternating insulative tiers and conductive tiers directly above a conductor tier. Strings of memory cells comprise channel-material strings that extend through the insulative tiers and the conductive tiers. The channel-material strings directly electrically couple with conductor material of the conductor tier. A through-array-via (TAV) region comprises TAVs that individually extend through the insulative tiers and the conductive tiers into the conductor tier. Individual of the TAVs comprises an upper portion directly above and joined with a lower portion. The individual TAVs in a vertical cross-section comprises at least one external upper jog surface. The individual TAVs comprise at least one external lower jog surface in the conductor tier in the vertical cross-section and that is below the upper jog surface. Other embodiments, including method, are disclosed.
Public/Granted literature
Information query
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