Invention Grant
- Patent Title: Apparatus of storing carriers and method of storing carriers
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Application No.: US17466270Application Date: 2021-09-03
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Publication No.: US12176229B2Publication Date: 2024-12-24
- Inventor: Yong Bae Choi , Ji Hyun Park , Shin Young Cheong
- Applicant: SEMES CO., LTD.
- Applicant Address: KR Cheonan-si
- Assignee: SEMES CO., LTD.
- Current Assignee: SEMES CO., LTD.
- Current Assignee Address: KR Cheonan-si
- Agency: KILE PARK REED & HOUTTEMAN PLLC
- Priority: KR10-2020-0113739 20200907
- Main IPC: H01L21/673
- IPC: H01L21/673

Abstract:
An apparatus of storing container includes a stocker including shelves being configured to support containers, respectively, a purging unit being configured to provide a purge gas for each of the shelves to purge the containers when the stocker is in a purge mode, and to provide the purge gas only for each of the shelves when the stocker is in a normal mode, an inspection unit being configured to inspect a purge quality of the purge gas provided to each of the shelves while the stocker is in the normal mode, and a control unit being configured to change the stocker between in the purge mode and in the normal mode, and being configured to control the purging unit according to a switch between the purge mode and the normal mode. Thus, the apparatus has improved operation efficiency.
Public/Granted literature
- US20220076974A1 APPARATUS OF STORING CARRIERS AND METHOD OF STORING CARRIERS Public/Granted day:2022-03-10
Information query
IPC分类: