Invention Grant
- Patent Title: Solidly-mounted transversely-excited film bulk acoustic resonator with recessed interdigital transducer fingers
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Application No.: US18307434Application Date: 2023-04-26
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Publication No.: US12176878B2Publication Date: 2024-12-24
- Inventor: Viktor Plesski
- Applicant: Murata Manufacturing Co., Ltd.
- Applicant Address: JP Nagaokakyo
- Assignee: Murata Manufacturing Co., Ltd.
- Current Assignee: Murata Manufacturing Co., Ltd.
- Current Assignee Address: JP Nagaokakyo
- Agency: ARENTFOX SCHIFF LLP
- Main IPC: H03H9/02
- IPC: H03H9/02 ; H03H3/02 ; H03H9/13 ; H03H9/54

Abstract:
An acoustic resonator is provided that includes a substrate; an acoustic Bragg reflector supported by the substrate; a piezoelectric plate above the acoustic Bragg reflector and opposite the substrate, the piezoelectric plate having at least one groove extending into a surface thereof; and an interdigital transducer (IDT) having a plurality of interleaved fingers with at least one finger is disposed in the at least one groove of the piezoelectric plate, respectively.
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