Invention Grant
- Patent Title: Cover with a sensor system for a configurable measuring system for a configurable sputtering system
-
Application No.: US15109202Application Date: 2015-12-21
-
Publication No.: US12183561B2Publication Date: 2024-12-31
- Inventor: Ivan Van De Putte , Niek Dewilde , Guy Gobin , Wilmert De Bosscher
- Applicant: SOLERAS ADVANCED COATINGS BVBA
- Applicant Address: BE Deinze
- Assignee: SOLERAS ADVANCED COATINGS BVBA
- Current Assignee: SOLERAS ADVANCED COATINGS BVBA
- Current Assignee Address: BE Deinze
- Agency: Workman Nydegger
- Priority: BE2015/5011 20150111
- International Application: PCT/EP2015/080897 WO 20151221
- International Announcement: WO2016/110407 WO 20160714
- Main IPC: H01J37/34
- IPC: H01J37/34 ; C23C14/34 ; C23C14/54 ; H01J37/32
Abstract:
A cover for a configurable measuring system of a configurable sputtering system which is adapted for sputtering multilayer coatings with varying compositions and comprising a plurality of sputtering zones and having a plurality of apertures on which the cover is detachably attachable, and wherein the cover comprises a sensor system for in situ detection of a property of the multilayer coating on a substrate, wherein said at least one sensor system is attached to the cover.
Public/Granted literature
- US20160362780A1 A Cover with a Sensor System for a Configurable Measuring System for a Configurable Sputtering System Public/Granted day:2016-12-15
Information query
