Invention Grant
- Patent Title: Transportation system of a cassette and method of auto teaching a position of a cassette
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Application No.: US17591003Application Date: 2022-02-02
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Publication No.: US12183614B2Publication Date: 2024-12-31
- Inventor: Jeong Tae Yun
- Applicant: RORZE SYSTEMS CORPORATION
- Applicant Address: KR Yongin-si
- Assignee: RORZE SYSTEMS CORPORATION
- Current Assignee: RORZE SYSTEMS CORPORATION
- Current Assignee Address: KR Yongin-si
- Agency: KILE PARK REED & HOUTTEMAN PLLC
- Priority: KR10-2021-0114381 20210830
- Main IPC: H01L21/68
- IPC: H01L21/68 ; B65G43/00 ; H01L21/677

Abstract:
A transportation system of a cassette according to an embodiment of the present invention comprises a port and a system controller. The port accommodates a cassette carrying a glass substrate. The port includes a plurality of displacement sensors for sensing a position of a cassette. The system controller calculates a distortion amount of the cassette using a plurality of sensed values of the cassette and a misplaced amount of the displacement sensors to determine whether the cassette is in a normal settlement status. Therefore, the position of the cassette can be automatically taught without clamping operation of a clamping device clamping the cassette disposed in the port, so that it is possible to prevent defects of the glass substrate by removing various defect-causing factors such as particles and static electricity that may occur during a conventional clamping operation.
Public/Granted literature
- US20230064709A1 TRANSPORTATION SYSTEM OF A CASSETTE AND METHOD OF AUTO TEACHING A POSITION OF A CASSETTE Public/Granted day:2023-03-02
Information query
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