Invention Grant
- Patent Title: IC package including multi-chip unit with bonded integrated heat spreader
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Application No.: US18222855Application Date: 2023-07-17
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Publication No.: US12183649B2Publication Date: 2024-12-31
- Inventor: Debendra Mallik , Ravindranath Mahajan , Digvijay Raorane
- Applicant: Intel Corporation
- Applicant Address: US CA Santa Clara
- Assignee: Intel Corporation
- Current Assignee: Intel Corporation
- Current Assignee Address: US CA Santa Clara
- Agency: Schwabe, Williamson & Wyatt, P.C.
- Main IPC: H01L23/367
- IPC: H01L23/367 ; H01L21/48 ; H01L21/56 ; H01L23/00 ; H01L23/31 ; H01L23/495 ; H01L23/538

Abstract:
A multi-chip unit suitable for chip-level packaging may include multiple IC chips that are interconnected through a metal redistribution structure, and that are directly bonded to an integrated heat spreader. Bonding of the integrated heat spreader to the multiple IC chips may be direct so that no thermal interface material (TIM) is needed, resulting in a reduced bond line thickness (BLT) and lower thermal resistance. The integrated heat spreader may further serve as a structural member of the multi-chip unit, allowing a second side of the redistribution structure to be further interconnected to a host by solder interconnects. The redistribution structure may be fabricated on a sacrificial interposer that may facilitate planarizing IC chips of differing thickness prior to bonding the heat spreader. The sacrificial interposer may be removed to expose the RDL for further interconnection to a substrate without the use of through-substrate vias.
Public/Granted literature
- US20230360994A1 IC PACKAGE INCLUDING MULTI-CHIP UNIT WITH BONDED INTEGRATED HEAT SPREADER Public/Granted day:2023-11-09
Information query
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