- Patent Title: Interconnect structure and electronic apparatus including the same
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Application No.: US17902319Application Date: 2022-09-02
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Publication No.: US12183679B2Publication Date: 2024-12-31
- Inventor: Hyeonjin Shin , Minhyun Lee , Changseok Lee , Hyeonsuk Shin , Seokmo Hong
- Applicant: Samsung Electronics Co., Ltd. , UNIST (ULSAN NATIONAL INSTITUTE OF SCIENCE AND TECHNOLOGY)
- Applicant Address: KR Suwon-si; KR Ulsan
- Assignee: Samsung Electronics Co., Ltd.,UNIST (ULSAN NATIONAL INSTITUTE OF SCIENCE AND TECHNOLOGY)
- Current Assignee: Samsung Electronics Co., Ltd.,UNIST (ULSAN NATIONAL INSTITUTE OF SCIENCE AND TECHNOLOGY)
- Current Assignee Address: KR Suwon-si; KR Ulsan
- Agency: HARNESS, DICKEY & PIERCE, P.L.C.
- Priority: KR10-2019-0135755 20191029,KR10-2020-0066709 20200602
- Main IPC: H01L23/532
- IPC: H01L23/532 ; H01L23/522

Abstract:
An interconnect structure and an electronic apparatus including the interconnect structure are provided. The interconnect structure includes a conductive layer; a dielectric layer configured to surround at least a part of the conductive layer; and a diffusion barrier layer disposed between the conductive layer and the dielectric layer and configured to limit and/or prevent a conductive material of the conductive layer from diffusing into the dielectric layer, and at least one of the dielectric layer and the diffusion barrier layer includes a boron nitride layer of a low dielectric constant.
Public/Granted literature
- US20220415801A1 INTERCONNECT STRUCTURE AND ELECTRONIC APPARATUS INCLUDING THE SAME Public/Granted day:2022-12-29
Information query
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