Invention Grant
- Patent Title: Resonator, linear accelerator, and ion implanter having dielectric-free resonator chamber
-
Application No.: US17980894Application Date: 2022-11-04
-
Publication No.: US12185451B2Publication Date: 2024-12-31
- Inventor: Robert B. Vopat , Charles T. Carlson
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: KDW FIRM PLLC
- Main IPC: H05H9/00
- IPC: H05H9/00 ; H01J37/317 ; H05H7/18
Abstract:
An apparatus may include a resonator chamber, arranged in a vacuum enclosure; an RF electrode assembly, arranged within the vacuum enclosure; and a resonator coil, disposed within the resonator chamber, the resonator coil having a high voltage end, directly connected to at least one RF electrode of the RF electrode assembly.
Public/Granted literature
- US20240064888A1 RESONATOR, LINEAR ACCELERATOR, AND ION IMPLANTER HAVING DIELECTRIC-FREE RESONATOR CHAMBER Public/Granted day:2024-02-22
Information query
