- Patent Title: Piezoelectric device including base portion and membrane portion
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Application No.: US17506921Application Date: 2021-10-21
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Publication No.: US12185636B2Publication Date: 2024-12-31
- Inventor: Masayuki Suzuki , Shinsuke Ikeuchi , Fumiya Kurokawa , Yutaka Kishimoto
- Applicant: Murata Manufacturing Co., Ltd.
- Applicant Address: JP Nagaokakyo
- Assignee: Murata Manufacturing Co., Ltd.
- Current Assignee: Murata Manufacturing Co., Ltd.
- Current Assignee Address: JP Nagaokakyo
- Agency: Keating & Bennett, LLP
- Priority: JP2019-092680 20190516
- Main IPC: H10N30/87
- IPC: H10N30/87 ; H10N30/00

Abstract:
A piezoelectric device includes a membrane portion including a single-crystal piezoelectric layer, an upper electrode layer, and a lower electrode layer. The upper electrode layer is on a first surface. The lower electrode layer is on a second surface facing at least a portion of the upper electrode layer sandwiching the single-crystal piezoelectric layer. The single-crystal piezoelectric layer includes piezoelectric body cleavage directions extending along a boundary line between a cleavage plane occurring when the single-crystal piezoelectric layer is cleaved and the first surface. When viewed in a vertical direction, at least a portion of an upper electrode outer edge and at least a portion of a lower electrode outer edge are non-parallel to at least one of the piezoelectric body cleavage directions.
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