Invention Grant
- Patent Title: Sensor device including sensor unit for a gaseous medium
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Application No.: US18304989Application Date: 2023-04-21
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Publication No.: US12188839B2Publication Date: 2025-01-07
- Inventor: Rainer Leuschner , Kerstin Kaemmer , Roland Meier , Marten Oldsen , Karolina Zogal
- Applicant: Infineon Technologies AG
- Applicant Address: DE Neubiberg
- Assignee: Infineon Technologies AG
- Current Assignee: Infineon Technologies AG
- Current Assignee Address: DE Neubiberg
- Agency: Slater Matsil, LLP
- Priority: DE102016121683.6 20161111
- Main IPC: G01L9/00
- IPC: G01L9/00 ; G01N33/00

Abstract:
A sensor device includes a sensor unit sensitive for a property of a gaseous medium. The sensor unit is formed on a first surface of a sensor substrate. A frame structure on the first surface includes a first loop portion laterally surrounding a first area that includes the sensor unit. A communicating channel accesses the first area through at least one of a lateral port in the first loop portion and a base port in the sensor substrate. A lid structure completely covers the frame structure and the first area.
Public/Granted literature
- US20230251154A1 Sensor Device Including Sensor Unit for a Gaseous Medium Public/Granted day:2023-08-10
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