Invention Grant
- Patent Title: Apparatus for thermally processing a substrate
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Application No.: US17555484Application Date: 2021-12-19
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Publication No.: US12191171B2Publication Date: 2025-01-07
- Inventor: Xin Zhi He , Wen Yi Tan
- Applicant: United Semiconductor (Xiamen) Co., Ltd.
- Applicant Address: CN Fujian
- Assignee: United Semiconductor (Xiamen) Co., Ltd.
- Current Assignee: United Semiconductor (Xiamen) Co., Ltd.
- Current Assignee Address: CN Fujian
- Agent Winston Hsu
- Priority: CN202122663379.2 20211102
- Main IPC: H01L21/67
- IPC: H01L21/67 ; H05B31/02

Abstract:
An apparatus for thermally processing a substrate includes a substrate support for holding the substrate and lamps disposed above the substrate support. The lamps are grouped into concentric lamp zones including a center zone comprised of a center lamp and peripheral lamps surrounding the center lamp. A center sleeve is coupled to the center lamp and peripheral sleeves are coupled to the peripheral lamps, respectively, for directing radiated heat to the substrate during thermal processing. The center sleeve has a higher surface roughness than that of the peripheral sleeves.
Public/Granted literature
- US20230140032A1 APPARATUS FOR THERMALLY PROCESSING A SUBSTRATE Public/Granted day:2023-05-04
Information query
IPC分类: