Invention Grant
- Patent Title: Actively clamped carrier assembly for processing tools
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Application No.: US18338443Application Date: 2023-06-21
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Publication No.: US12191186B2Publication Date: 2025-01-07
- Inventor: Benjamin B. Riordon , James D. Strassner
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Patterson + Sheridan, LLP
- Main IPC: H01L21/683
- IPC: H01L21/683 ; B05C21/00 ; C23C14/04 ; C23C16/04 ; C23C16/458 ; H01L21/02 ; H01L21/687

Abstract:
Embodiments of the present disclosure are related to carrier assemblies that can clamp more than one optical device substrates and methods for forming the carrier assemblies. The carrier assembly includes a carrier, one or more substrates, and a mask. The carrier is magnetically coupled to the mask to retain the one or more substrates. The carrier assembly is used for supporting and transporting the one or more substrates during processing. The carrier assembly is also used for masking the one or more substrates during PVD processing. Methods for assembling the carrier assembly in a build chamber are described herein.
Public/Granted literature
- US20230352336A1 ACTIVELY CLAMPED CARRIER ASSEMBLY FOR PROCESSING TOOLS Public/Granted day:2023-11-02
Information query
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