Invention Grant
- Patent Title: Semiconductor device with reduced flicker noise
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Application No.: US18323457Application Date: 2023-05-25
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Publication No.: US12191374B2Publication Date: 2025-01-07
- Inventor: Hsin-Li Cheng , Liang-Tai Kuo , Yu-Chi Chang
- Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: Eschweiler & Potashnik, LLC
- Main IPC: H01L29/66
- IPC: H01L29/66 ; H01L21/3115 ; H01L21/324 ; H01L29/51

Abstract:
In some embodiments, a semiconductor device is provided. The semiconductor device includes a gate electrode disposed on a substrate. Source/drain regions are disposed on or within the substrate along opposing sides of the gate electrode. A noise reducing component is arranged along an upper surface of the gate electrode and/or along an upper surface of the substrate over the source/drain regions. A cap layer covers the upper surface of the gate electrode and/or the upper surface of the substrate over the source/drain regions. An inter-level dielectric (ILD) is disposed over and along one or more sidewalls of the cap layer.
Public/Granted literature
- US20230299171A1 SEMICONDUCTOR DEVICE WITH REDUCED FLICKER NOISE Public/Granted day:2023-09-21
Information query
IPC分类: