Invention Grant
- Patent Title: System and method for operating the same
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Application No.: US18338981Application Date: 2023-06-21
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Publication No.: US12198953B2Publication Date: 2025-01-14
- Inventor: Jia-Rong Xiao , Wei-Hsiang Huang , Sen-Yeo Peng , Chui-Ya Peng
- Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
- Applicant Address: TW Hsinchu
- Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
- Current Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
- Current Assignee Address: TW Hsinchu
- Agency: Maschoff Brennan
- Main IPC: H01L21/67
- IPC: H01L21/67

Abstract:
A system includes a cooler, a concentration meter, a first pump and a second pump. The cooler is configured to cool first liquid by second liquid in the cooler. The concentration meter is configured to measure a concentration of the first liquid. The first pump is configured to move the first liquid according to the concentration. The second pump is coupled to the cooler, disposed with the first pump in a parallel manner, and configured to move the second liquid.
Public/Granted literature
- US20230343617A1 SYSTEM AND METHOD FOR OPERATING THE SAME Public/Granted day:2023-10-26
Information query
IPC分类: