Invention Grant
- Patent Title: System and method for adjusting oxygen content in front opening unified pod
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Application No.: US17519611Application Date: 2021-11-05
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Publication No.: US12198960B2Publication Date: 2025-01-14
- Inventor: Dapeng Zhang
- Applicant: CHANGXIN MEMORY TECHNOLOGIES, INC.
- Applicant Address: CN Hefei
- Assignee: CHANGXIN MEMORY TECHNOLOGIES, INC.
- Current Assignee: CHANGXIN MEMORY TECHNOLOGIES, INC.
- Current Assignee Address: CN Hefei
- Agency: Kilpatrick Townsend & Stockton LLP
- Priority: CN202110846065.8 20210726
- Main IPC: H01L21/673
- IPC: H01L21/673 ; G05D11/13

Abstract:
Embodiments of the disclosure provide a system and method for adjusting an oxygen content in an FOUP. The system for adjusting the oxygen content in the FOUP includes an inflating assembly, the FOUP, a controller and a detecting assembly; the inflating assembly is connected with a gas inlet of the FOUP and configured to input an inert gas to the FOUP; the detecting assembly is connected with a gas outlet of the FOUP and configured to detect the oxygen content of the gas in the FOUP; and the inflating assembly and the detecting assembly are both connected with the controller, and the controller is configured to adjust a flow of the inert gas input from the inflating assembly to the FOUP according to the oxygen content detected by the detecting assembly.
Public/Granted literature
- US20230028319A1 SYSTEM AND METHOD FOR ADJUSTING OXYGEN CONTENT IN FRONT OPENING UNIFIED POD Public/Granted day:2023-01-26
Information query
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